Evatec Process Systems (CH)
Substrate Handling:
This cassette-to-cassette wafer handling completes the flexible sputter tool LLS EVO II from Evatec with a fully automated cassette-to-cassette handling. It is available for different wafer sizes up to 8" and with various options including wafer masking, flat/notch alignment and bar code reader.
Key features:
- Fully automated cassette-to-cassette handling
- Cleanroom Class 10 certified robot
- Very small footprint
