Evatec Process Systems (CH)
Substrate Handling:

This cassette-to-cassette wafer handling completes the flexible sputter tool LLS EVO II from Evatec with a fully automated cassette-to-cassette handling. It is available for different wafer sizes up to 8" and with various options including wafer masking, flat/notch alignment and bar code reader.

Key features:

  • Fully automated cassette-to-cassette handling
  • Cleanroom Class 10 certified robot
  • Very small footprint

PDF: Brochure LLS EVO 2